SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

SEMI Standards and Safety Guidelines are provided in PDF format and protected by Digital Rights Management (DRM). To open DRM-protected PDFs, users must install Adobe Acrobat and the FileOpen DRM plug-in. Devices and operating systems must meet FileOpen compatibility requirements. For more information, see the SEMI DRM FAQ.

 

SEMI Standards individual downloads are licensed to a single user for use on a single authorized device and may not be copied, shared, transferred, distributed, or otherwise made available to others. Organizations requiring access for multiple users should contact their local SEMI office.

 

SEMI Standards content may not be used with artificial intelligence (AI) or machine-learning systems, including for training, fine-tuning, retrieval, grounding, prompt development, automated analysis, or content generation. SEMI does not currently offer licensing or permission for these uses. Questions may be directed to standardspublishing@semi.org.


C00347 - SEMI C3.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality
SEMI C3.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality
SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality
SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00351 - SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality
SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4)
SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00355 - SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality
SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00356 - SEMI C3.56 - Specification for Diborane Mixtures
SEMI C3.56 - Specification for Diborane Mixtures Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
C00602 - SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00603 - SEMI C6.3 - Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
C00604 - SEMI C6.4 - Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
C00605 - SEMI C6.5 - Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More