Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI C3 - Specification for Gases
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SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality
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SEMI C3.5 - Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality
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SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
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SEMI C3.12 - Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
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SEMI C3.15 - Standard for Nitrogen (N2), In Cylinders, 99.9992% Quality
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SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality
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SEMI C3.19 - Standard for Hydrogen (H2), 99.9995% Quality
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SEMI C3.20 - Specification for Helium (He), in Cylinders, 99.9995%
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SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality
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SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality
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SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality
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SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality
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SEMI C3.27 - Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality
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SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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SEMIViews
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