SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $170 USD and $335 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality
C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional)
C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality
C00335 - SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality
C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional)
C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality
C00339 - SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98%
C00340 - SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality
C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality
C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)
C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional)
C00347 - SEMI C3.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality
C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality
C00351 - SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality
C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality
C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4)
C00355 - SEMI C3.55 - Specification for Silane (SiH4), Bulk, 99.994% Quality
C00356 - SEMI C3.56 - Specification for Diborane Mixtures
C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
C00602 - SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
C00603 - SEMI C6.3 - Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
C00604 - SEMI C6.4 - Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
C00605 - SEMI C6.5 - Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
C00606 - SEMI C6.6 - Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
C00607 - SEMI C6.7 - Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
C00901 - SEMI C9.1 - Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
C01000 - SEMI C10 - Guide for Determination of Method Detection Limits
C01400 - SEMI C14 - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
C01500 - SEMI C15 - Test Method for ppm and ppb Humidity Standards
C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices
C01800 - SEMI C18 - Specification for Acetic Acid
C01900 - SEMI C19 - Specification for Acetone
C02000 - SEMI C20 - Specification and Guide for Ammonium Fluoride 40%
C02100 - SEMI C21 - Specification and Guide for Ammonium Hydroxide
C02200 - SEMI C22 - Guide for Boron Tribromide
C02300 - SEMI C23 - Specification for Buffered Oxide Etchants
C02400 - SEMI C24 - Specification for n-Butyl Acetate
C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride)
C02600 - SEMI C26 - Specification and Guide for Hexamethyldisilazane (HMDS)
C02700 - SEMI C27 - Specification and Guide for Hydrochloric Acid
C02800 - SEMI C28 - Specification and Guide for Hydrofluoric Acid
C02900 - SEMI C29 - Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
C03000 - SEMI C30 - Specification for Hydrogen Peroxide
C03100 - SEMI C31 - Specification for Methanol
C03200 - SEMI C32 - Specification for Methyl Ethyl Ketone
C03300 - SEMI C33 - Specifications for n-Methyl 2-Pyrrolidone
C03400 - SEMI C34 - Specification and Guide for Mixed Acid Etchants
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