SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

SEMI Standards and Safety Guidelines are provided in PDF format and protected by Digital Rights Management (DRM). To open DRM-protected PDFs, users must install Adobe Acrobat and the FileOpen DRM plug-in. Devices and operating systems must meet FileOpen compatibility requirements. For more information, see the SEMI DRM FAQ.

 

SEMI Standards individual downloads are licensed to a single user for use on a single authorized device and may not be copied, shared, transferred, distributed, or otherwise made available to others. Organizations requiring access for multiple users should contact their local SEMI office.

 

SEMI Standards content may not be used with artificial intelligence (AI) or machine-learning systems, including for training, fine-tuning, retrieval, grounding, prompt development, automated analysis, or content generation. SEMI does not currently offer licensing or permission for these uses. Questions may be directed to standardspublishing@semi.org.


C00328 - SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality
SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality
SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality
SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional)
C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality
SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional)
C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality
SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00335 - SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality
SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional)
SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality
SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00339 - SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98%
SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98% Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00340 - SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality
SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality
SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)
SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional)
SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) Sale priceMember Price: $148.00
Non-Member Price: $193.00
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More