SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved standards and guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $170 USD and $335 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

C00327 - SEMI C3.27 - Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality
SEMI C3.27 - Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00328 - SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality
SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality
SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00330 - SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality
SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional)
C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality
SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional)
C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality
SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00335 - SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality
SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00336 - SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional)
SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional) Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00337 - SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality
SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00339 - SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98%
SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98% Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00340 - SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality
SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality
SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00
C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)
SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) Sale priceMember Price: $138.00
Non-Member Price: $180.00
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SEMIViews

Easy Web Access to SEMI International Standards/Guidelines SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More