Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M61 - Specification for Silicon Epitaxial Wafers with Buried Layers
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M62 - Specification for Silicon Epitaxial Wafers
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Member Price : $148.00
SEMI M63 - Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M64 - Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M65 - Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M66 - Test Method to Extract Effective Work Function in Oxide and High-K Gate Stacks Using the MIS Flat Band Voltage-Insulator Thickness Technique
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M67 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Thickness Data Array Using the ESFQR, ESFQD, and ESBIR Metrics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M68 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M70 - Test Method for Determining Wafer-Near-Edge Geometry Using Partial Wafer Site Flatness
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M73 - Test Method for Extracting Relevant Characteristics from Measured Wafer Edge Profiles
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M74 - Specification for 450 mm Diameter Mechanical Handling Polished Wafers
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers
Regular price$300.00 USD
Sale price$193.00 USD
SEMI M77 - Test Method for Determining Wafer Near-Edge Geometry Using Roll-Off Amount, ROA
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
Recently Published Standards
SEMI 3D24 - Guide for Peel Testing of Redistribution Layers and Other Traces Used Within Advanced Packages and Structures
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E200 - Specification for Large JEDEC™ Tray Stack Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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