Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI C6.2 - パイプラインガスとして授受されるグレード20/0.02酸素に対するパーティクル仕様
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SEMI C6.3 - パイプラインガスとして授受されるグレード20/0.2水素(H2)に対するパーティクル仕様
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SEMI C6.4 - パイプラインガスとして授受されるグレード20/0.02窒素(N2)およびアルゴン(Ar)に対するパーティクル仕様
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SEMI C6.5 - パイプラインガスとして授受されるグレード10/0.2窒素(N2)およびアルゴン(Ar)に対するパーティクル仕様
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SEMI C6.6 - パイプラインガスとして授受されるグレード10/0.1窒素(N2)およびアルゴン(Ar)に対するパーティクル仕様
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SEMI C6.7 - 高圧ガスシリンダ中のグレード10/0.2窒素に対するパーティクル仕様
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SEMI C10 - MDL(定量下限値)決定に関するガイド
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SEMI C15 - PPMおよびPPB水分標準のためのテスト方法
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SEMI C21 - 水酸化アンモニウムの仕様とガイドライン
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SEMI C28 - フッ化ケイ素酸の仕様
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SEMI C29 - 4.9%フッ化ケイ素酸(10:1 V/V)の仕様とガイドライン
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SEMI C30 - 過酸化水素の仕様
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SEMI C32 - メチルエチルケトンの仕様
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SEMI C37 - りん腐食剤の仕様
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SEMI C40 - 水酸化カリウム45%溶液の仕様
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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