Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念,動作,サービス
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SEMI E119 - 300 mmウェーハの工場間輸送用狭ピッチフロントオープニングボックス(FOBIT)の機械仕様
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SEMI E119 - Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm Wafers
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Non-Member Price: $193.00
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SEMI E120 - COMMON EQUIPMENT MODEL 사양
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SEMI E120 - Specification for the Common Equipment Model (CEM)
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SEMI E120 - 共通装置モデル(CEM)の仕様
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SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
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SEMI E121 - 半導体製造への応用に関するXMLスタイルと利用のガイド
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SEMI E122 - Specification for Tester Equipment Specific Equipment Model (TSEM)
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SEMI E122 - テスト装置の特定装置モデル(TSEM)のスタンダード
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SEMI E123 - Specification for Handler Equipment Specific Equipment Model (HSEM)
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SEMI E123 - ハンドラ装置の特定装置モデル(HSEM)のスタンダード
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SEMI E124 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics
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SEMI E124 - 総合工場効率(OFE)およびその他の工場レベルの生産性測定基準の定義とその計算法についてのガイド
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SEMI E125 - EQUIPMENT SELF DESCRIPTION 사양
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
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