Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI P30 - 寸法測定用走査型電子顕微鏡(CD-SEM)の目録発行の実施要領
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SEMI P31 - Practice for Catalog Publication for Chemical Amplified (CA) Photoresist Parameter
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SEMI P31 - 化学増幅型(CA)フォトレジストパラメータのカタログ発行の作業方法
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SEMI P32 - Test Method for Determination of Trace Metals in Photoresist
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SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法
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SEMI P34 - 230mm方形フォトマスク基板の仕様
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SEMI P34 - Specification for 230 mm Square Photomask Substrates
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SEMI P35 - Terminology for Microlithography Metrology
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SEMI P35 - マイクロリソグラフィメトロロジの用語法
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SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM)
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SEMI P36 - 測長走査型電子顕微鏡(CD-SEM)用倍率標準試料のガイド
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SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks
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SEMI P37 - 極紫外線リソグラフィマスク基板の仕様
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SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード(OPEN ARTWORK SYSTEM INTERCHANGE STANDARD)
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SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard
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Recently Published Standards
SEMI E200 - Specification for Large JEDEC™ Tray Stack Load Port
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SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
SEMIViews
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