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S01200 - SEMI S12 - 装置の汚染除去に対する環境,健康および安全ガイドライン
F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube
F09300 - SEMI F93 - Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
F09200 - SEMI F92 - Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
F09100 - SEMI F91 - Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
F09000 - SEMI F90 - Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
F08900 - SEMI F89 - Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
F08500 - SEMI F85 - Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
F08400 - SEMI F84 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
F08300 - SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
F07100 - SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System
SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System Regular price$300.00 USD Sale price$187.00 USD
F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
F03500 - SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様
SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture
SEMI E96 - Guide for CIM Framework Technical Architecture Sale priceMember Price: $144.00
Non-Member Price: $187.00
E09500 - SEMI E95 - 半導体製造装置のヒューマンインタフェースに関する仕様
E08900 - SEMI E89 - 測定システム分析(MSA)のガイド
SEMI E89 - 測定システム分析(MSA)のガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps
SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Sale priceMember Price: $144.00
Non-Member Price: $187.00
E04800 - SEMI E48 - Specification for SMIF Indexer Volume Requirement
SEMI E48 - Specification for SMIF Indexer Volume Requirement Sale priceMember Price: $144.00
Non-Member Price: $187.00
E04700 - SEMI E47 - Specification for 150 mm/200 mm Pod Handles
SEMI E47 - Specification for 150 mm/200 mm Pod Handles Sale priceMember Price: $144.00
Non-Member Price: $187.00
E04100 - SEMI E41 - Exception Management (EM) Standard
SEMI E41 - Exception Management (EM) Standard Sale priceMember Price: $144.00
Non-Member Price: $187.00
E03600 - SEMI E36 - Semiconductor Equipment Manufacturing Information Tagging Specification
SEMI E36 - Semiconductor Equipment Manufacturing Information Tagging Specification Sale priceMember Price: $144.00
Non-Member Price: $187.00