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SEMI Standards are voluntary technical agreements for the semiconductor, flat panel display, micro-electromechanical systems, photovoltaic, and high-brightness LED industries.
Historical Individual Standards
Historical versions of SEMI Standards are available for purchase. If a document is not available on the Historical Standards page, please contact customer service at 408.943.6901, or by email at customerservice@semi.org, to request that it be added.
Please be aware that information contained in older versions of SEMI Standards may be obsolete. SEMI encourages the use of current Standards.
459 products
SEMI G1 - 仕様Cer-DIPパッケージ構造
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI G19 - エッチングにより製造されるDIPリードフレームのための仕様
Sale priceMember Price: $176.00
Non-Member Price: $180.00
Non-Member Price: $180.00
SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI T15 - 治具IDの一般仕様 （コンセプト）
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P9 - マイクロエレクトロニクス用レジストの機能的なテスト（ガイドライン）
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P8 - フォトレジスト中の水分の測定方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P7 - 粘性決定方法，方法A－動粘度
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P5 - ペリクルの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P46 - XMLによるフォトマスクのCD計測情報データの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P40 - 極紫外線リソグラフィマスクの取り付けに関する要求条件およびアライメント基準位置の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
Popular Standards
SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Sale price
Member Price : $286.00
SEMI S8 - Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI E187 - Specification for Cybersecurity of Fab Equipment
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI F57 - Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Processes
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI F47 - Specification for Semiconductor Processing Equipment Voltage Sag Immunity
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00