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SEMI P5 - Specification for Pellicles Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P48 - Specification of Fiducial Marks for EUV Mask Blank Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P45 - Specification for Job Deck Data Format for Mask Tools Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P44 - Specification for Open Artwork System Interchange Standard (OASIS ®) Specific to Mask Tools Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P40 - Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard Sale priceMember Price: $278.00
Non-Member Price: $369.00

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SEMI P36 - Guide for Magnification Reference for Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Sale priceMember Price: $144.00
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SEMI P29 - Specification for Characteristics Specific to Attenuated Phase Shift Masks and Masks Blanks Sale priceMember Price: $144.00
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SEMI P22 - Guideline for Photomask Defect Classification and Size Definition Sale priceMember Price: $144.00
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SEMI P22 - フォトマスク欠陥の分類とサイズ定義についてのガイドライン Sale priceMember Price: $171.00
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SEMI M51 - シリコンウェーハ評価のためのSiO2の即時絶縁破壊特性（TZDB）の試験方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI MF978 - Test Method for Characterizing Semiconductor Deep Levels by Transient Capacitance Techniques Sale priceMember Price: $144.00
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SEMI MF95 - Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer Sale priceMember Price: $144.00
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SEMI MF951 - Test Method for Determination of Radial Interstitial Oxygen Variation in Silicon Wafers Sale priceMember Price: $144.00
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SEMI MF950 - Test Method for Measuring the Depth of Crystal Damage of a Mechanically Worked Silicon Wafer Surface by Angle Polished and Defect Etching Sale priceMember Price: $144.00
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SEMI MF928 - Test Method for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates Sale priceMember Price: $144.00
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SEMI MF847 - Test Method for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques Sale priceMember Price: $144.00
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SEMI MF84 - Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe Sale priceMember Price: $144.00
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SEMI MF81 - Test Method for Measuring Radial Resistivity Variation on Silicon Wafers Sale priceMember Price: $144.00
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SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Sale priceMember Price: $144.00
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SEMI MF723 - Practice for Conversion Between Resistivity and Dopant or Carrier Density for Boron-Doped, Phosphorous-Doped, and Arsenic-Doped Silicon Sale priceMember Price: $144.00
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SEMI MF674 - Practice for Preparing Silicon for Spreading Resistance Measurements Sale priceMember Price: $144.00
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SEMI MF673 - Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gauge Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI MF672 - Guide for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe Sale priceMember Price: $144.00
Non-Member Price: $187.00