SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

SEMI Standards and Safety Guidelines are provided in PDF format and protected by Digital Rights Management (DRM). To open DRM-protected PDFs, users must install Adobe Acrobat and the FileOpen DRM plug-in. Devices and operating systems must meet FileOpen compatibility requirements. For more information, see the SEMI DRM FAQ.

 

SEMI Standards individual downloads are licensed to a single user for use on a single authorized device and may not be copied, shared, transferred, distributed, or otherwise made available to others. Organizations requiring access for multiple users should contact their local SEMI office.

 

SEMI Standards content may not be used with artificial intelligence (AI) or machine-learning systems, including for training, fine-tuning, retrieval, grounding, prompt development, automated analysis, or content generation. SEMI does not currently offer licensing or permission for these uses. Questions may be directed to standardspublishing@semi.org.


E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM)
SEMI E153 - Specification for AMHS SEM (AMHS SEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Regular price$300.00 USD Sale price$193.00 USD
E15600 - SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
E15700 - SEMI E157 - Specification for Module and Substrate Process TrackingE15700 - SEMI E157 - Specification for Module and Substrate Process Tracking
E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
E15900 - SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
E16000 - SEMI E160 - Specification for Communication of Data Quality
SEMI E160 - Specification for Communication of Data Quality Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16100 - SEMI E161 - Guide for Identification and Classification of Training Tiers
SEMI E161 - Guide for Identification and Classification of Training Tiers Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16200 - SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
E16400 - SEMI E164 - Specification for EDA Common Metadata
SEMI E164 - Specification for EDA Common Metadata Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16500 - SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available
E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard
E16700 - SEMI E167 - Specification for Equipment Energy Saving Mode Communications (EESM)
SEMI E167 - Specification for Equipment Energy Saving Mode Communications (EESM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E16800 - SEMI E168 - Specification for Product Time Measurement
SEMI E168 - Specification for Product Time Measurement Sale priceMember Price: $148.00
Non-Member Price: $193.00
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More