SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
E14900 - SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
E15000 - SEMI E150 - Guide for Equipment Training Best Practices
SEMI E150 - Guide for Equipment Training Best Practices Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15100 - SEMI E151 - Guide for Understanding Data Quality
SEMI E151 - Guide for Understanding Data Quality Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM)
SEMI E153 - Specification for AMHS SEM (AMHS SEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E15400 - SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
SEMI E154 - Specification for Mechanical Features of 450 mm Load Port Regular price$300.00 USD Sale price$187.00 USD
E15600 - SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
E15700 - SEMI E157 - Specification for Module and Substrate Process TrackingE15700 - SEMI E157 - Specification for Module and Substrate Process Tracking
E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
E15900 - SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
E16000 - SEMI E160 - Specification for Communication of Data Quality
SEMI E160 - Specification for Communication of Data Quality Sale priceMember Price: $144.00
Non-Member Price: $187.00
E16100 - SEMI E161 - Guide for Identification and Classification of Training Tiers
SEMI E161 - Guide for Identification and Classification of Training Tiers Sale priceMember Price: $144.00
Non-Member Price: $187.00
E16200 - SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More