Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M64 - 赤外線吸収スペクトル法による絶縁(SI)ガリウムヒ素単結晶内のEL2深いドナー濃度の試験方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M65 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M66 - MISフラットバンド電圧―絶縁膜厚法を使った,酸化膜,およびhigh-κゲートスタックの有効仕事関数の算出方法
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Non-Member Price: $231.00
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SEMI M67 - 測定した厚さデータ配列からESFQR,ESFQD,ESBIR METRICS法を使ってウェーハのエッジ近傍形状を決定するための作業方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M68 - 測定した高さデータ配列から曲率法ZDDを使ってウェーハのエッジ近傍形状を決定するための作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M70 - パーシャルサイト平坦度を使ってウェーハのエッジ近傍形状を決定するための作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M71 - CMOS LSI用シリコン・オン・インシュレーター(SOI)ウェーハのための仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M73 - 測定したウェーハエッジプロファイルから直接的関連性ある特性を抽出するテスト方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M75 - 鏡面単結晶ガリウムアンチモンスライスの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M76 - 開発用直径450 mmシリコン単結晶鏡面ウェーハの仕様
Regular price$360.00 USD
Sale price$231.00 USD
SEMI M77 - ロールオフ量(ROA)を使ってウェーハのエッジ近傍形状を決定するための作業方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M78 - 量産時における130nmから22nm世代のパターンなしシリコンウェーハ上のナノトポグラフィー決定に関するガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M79 - 太陽電池用円盤状100 mm鏡面研磨単結晶ゲルマニウムウェーハの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M80 - 450 mmウェーハの搬送および出荷用フロントオープニング・シッピングボックスの機械仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
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