Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI P16 - 黒鉛炉原子吸光分光法によるポジティブフォトレジスト・メタルイオンフリー(MIF)現像液中の錫の測定
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SEMI P17 - 誘導結合プラズマ発光分光法(ICP)によるポジティブ・フォトレジスト・メタルイオンフリー(MIF)現像液における鉄,亜鉛,カルシウム,マグネシウム,銅,ホウ素,アルミニウム,クロム,マンガン,およびニッケルの測定
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SEMI P18 - ウェーハステッパーのオーバーレイ能力
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SEMI P19 - 集積回路製造用メトロロジパターンセル
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SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン(提案)
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SEMI P21 - マスク描画装置の精度表示のガイドライン
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SEMI P22 - フォトマスク欠陥の分類とサイズ定義についてのガイドライン
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SEMI P23 - プログラム欠陥マスクおよびマスク欠陥検査システムの感度分析ベンチマーク手順についてのガイドライン
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SEMI P24 - CD測長手順
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SEMI P25 - 焦点深度および最適焦点深度(仕様)
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SEMI P26 - フォトレジストの感度測定用パラメータチェックリスト
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SEMI P27 - 基板上のレジスト膜厚の測定用パラメータチェックリスト
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SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン
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SEMI P29 - 減衰型位相シフトマスク(ハーフトーン型位相シフトマスク)およびマスクブランクスに特有な特性の仕様
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SEMI P30 - 寸法測定用走査型電子顕微鏡(CD-SEM)の目録発行の実施要領
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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