Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI P31 - 化学増幅型(CA)フォトレジストパラメータのカタログ発行の作業方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P34 - 230mm方形フォトマスク基板の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P35 - マイクロリソグラフィメトロロジの用語法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P36 - 測長走査型電子顕微鏡(CD-SEM)用倍率標準試料のガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P37 - 極紫外線リソグラフィマスク基板の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P39 - OASISTM – オープン・アートワーク・システム・インターチェンジ・スタンダード(OPEN ARTWORK SYSTEM INTERCHANGE STANDARD)
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P40 - 極紫外線リソグラフィマスクの取り付けに関する要求条件およびアライメント基準位置の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P41 - XMLによる,検査装置,修正装置およびレビュー装置間で取扱うマスク欠陥データ仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P42 - ウェーハ露光システムへの自動レシピ伝送のためのレチクルデータの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P44 - マスク装置向けオープン・アートワーク・システム・インターチェンジ・スタンダード(OASIS®)の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P46 - XMLによるフォトマスクのCD計測情報データの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI P47 - ラインエッジラフネス(Line Edge Roughness)およびライン幅ラフネス(Line Width Roughness)測定の試験方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI PV1 - 高分解能グロー放電質量分析を用いたシリコン太陽電池用シリコン原料中の微量元素測定に関するテスト方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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Non-Member Price: $193.00
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
Non-Member Price: $193.00
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