Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M81 - 単結晶シリコンカーバイド基板に存在する欠陥についてのガイド
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SEMI P1 - ハードサーフェス・フォトマスク用基板
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SEMI P2 - ハードサーフェス・フォトマスク用クロムブランク
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SEMI P3 - レジスト付きクロムブランク
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SEMI P5 - ペリクルの仕様
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SEMI P6 - フォトマスク用レジストレーションマーク
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SEMI P7 - 粘性決定方法,方法A-動粘度
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SEMI P8 - フォトレジスト中の水分の測定方法
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SEMI P9 - マイクロエレクトロニクス用レジストの機能的なテスト(ガイドライン)
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SEMI P10 - フォトマスクオーダーのデータ構造の仕様
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SEMI P11 - アルカリ現像溶液に対する全規定度の測定のテスト方法
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SEMI P12 - 誘導結合プラズマ発光分光法(ICP)によるポジティブ・フォトレジスト中の鉄,亜鉛,カルシウム,マグネシウム,銅,ホウ素,アルミニウム,クロム,マンガン,及びニッケルの測定
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SEMI P13 - 原子吸光分光法によるポジティブフォトレジスト中におけるナトリウムとカリウムの測定
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SEMI P14 - 黒鉛炉原子吸光分光法によるポジティブフォトレジスト中の錫の測定
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SEMI P15 - 原子吸光分光法によるポジティブフォトレジスト・メタルイオンフリー(MIF)現像液中のナトリウムとカリウムの測定
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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