Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M51 - シリコンウェーハ評価のためのSiO2の即時絶縁破壊特性(TZDB)の試験方法
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Non-Member Price: $231.00
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SEMI M52 - 130 nm,90nm,65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド
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Non-Member Price: $231.00
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SEMI M52 - Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 5 nm Technology Generations
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SEMI M53 - Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodispere Reference Spheres on Unpatterned Semiconductor Wafer Surfaces
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M53 - パターンのない半導体ウェーハ表面上に証明済み手法で付着した単分散標準粒子を用いた走査型表面検査システム較正の作業方法
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SEMI M54 - Guide for Semi-Insulating (SI) GaAs Material Parameters
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SEMI M54 - 半絶縁性(SI)GaAs材料のパラメータのガイド
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SEMI M55 - Specification for Polished Monocrystalline Silicon Carbide Wafers
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Non-Member Price: $193.00
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SEMI M55 - 鏡面単結晶シリコンカーバイドウェーハの仕様
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SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias
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SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法
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SEMI M57 - Specification for Silicon Annealed Wafers
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SEMI M57 - シリコンアニールウェーハの仕様
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SEMI M58 - DMAを基にしたパーティクル堆積システムとプロセス評価のためのテスト方法
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SEMI M58 - Test Method for Evaluating DMA Based Particle Deposition Systems and Processes
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
Non-Member Price: $193.00
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