Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M66 - Test Method to Extract Effective Work Function in Oxide and High-K Gate Stacks Using the MIS Flat Band Voltage-Insulator Thickness Technique
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M67 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Thickness Data Array Using the ESFQR, ESFQD, and ESBIR Metrics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M67 - 測定した厚さデータ配列からESFQR,ESFQD,ESBIR METRICS法を使ってウェーハのエッジ近傍形状を決定するための作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M68 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M68 - 測定した高さデータ配列から曲率法ZDDを使ってウェーハのエッジ近傍形状を決定するための作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M70 - Test Method for Determining Wafer-Near-Edge Geometry Using Partial Wafer Site Flatness
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M70 - パーシャルサイト平坦度を使ってウェーハのエッジ近傍形状を決定するための作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M71 - CMOS LSI用シリコン・オン・インシュレーター(SOI)ウェーハのための仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M73 - Test Method for Extracting Relevant Characteristics from Measured Wafer Edge Profiles
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M73 - 測定したウェーハエッジプロファイルから直接的関連性ある特性を抽出するテスト方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M74 - Specification for 450 mm Diameter Mechanical Handling Polished Wafers
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M74 - 直径450mmメカニカルハンドリング鏡面ウェーハの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M75 - 鏡面単結晶ガリウムアンチモンスライスの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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