Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M59 - Terminology for Silicon Technology
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SEMI M59 - シリコン技術の用語集
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SEMI M60 - Test Method for Time Dependent Dielectric Breakdown Characteristics of SiO2 Films for Si Wafer Evaluation
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SEMI M60 - シリコンウェーハ評価のためのSiO2の経時絶縁破壊特性の試験方法
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SEMI M61 - Specification for Silicon Epitaxial Wafers with Buried Layers
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SEMI M61 - 埋め込み層付きシリコンエピタキシャルウェーハの仕様
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SEMI M62 - Specification for Silicon Epitaxial Wafers
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SEMI M62 - シリコンエピタキシャルウェーハの仕様
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SEMI M63 - Test Method for Measuring the Al Fraction in AlGaAs on GaAs Substrates by High Resolution X-Ray Diffraction
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SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様
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SEMI M64 - Test Method for the EL2 Deep Donor Concentration in Semi-Insulating (SI) Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
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SEMI M64 - 赤外線吸収スペクトル法による絶縁(SI)ガリウムヒ素単結晶内のEL2深いドナー濃度の試験方法
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SEMI M65 - Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers
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SEMI M65 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様
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SEMI M66 - MISフラットバンド電圧―絶縁膜厚法を使った,酸化膜,およびhigh-κゲートスタックの有効仕事関数の算出方法
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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