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SEMI M46 - Test Method for Measuring Carrier Concentrations in Epitaxial Layer Structures by ECV Profiling
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M48 - Guide for Evaluating Chemical-Mechanical Polishing Processes of Films on Unpatterned Silicon Substrates
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M49 - 130 nmから65 nmへの技術世代のシリコンウェーハ用ジオメトリ測定システム規定のためのガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M49 - Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 16 nm Technology Generations
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M50 - Test Method for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M50 - オーバーレイ法による走査型表面検査システム用捕獲率および偽計数率を決定するための試験方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M51 - Test Method for Characterizing Silicon Wafer by Gate Oxide Integrity
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M51 - シリコンウェーハ評価のためのSiO2の即時絶縁破壊特性（TZDB）の試験方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M52 - 130 nm，90nm，65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M52 - Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 5 nm Technology Generations
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Member Price : $144.00
SEMI M53 - Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodispere Reference Spheres on Unpatterned Semiconductor Wafer Surfaces
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M53 - パターンのない半導体ウェーハ表面上に証明済み手法で付着した単分散標準粒子を用いた走査型表面検査システム較正の作業方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M54 - Guide for Semi-Insulating (SI) GaAs Material Parameters
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M54 - 半絶縁性（SI）GaAs材料のパラメータのガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M55 - Specification for Polished Monocrystalline Silicon Carbide Wafers
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M55 - 鏡面単結晶シリコンカーバイドウェーハの仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M56 - Practice for Determining Cost Components for Metrology Equipment Due to Measurement Variability and Bias
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M57 - Specification for Silicon Annealed Wafers
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M57 - シリコンアニールウェーハの仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M58 - DMAを基にしたパーティクル堆積システムとプロセス評価のためのテスト方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI M58 - Test Method for Evaluating DMA Based Particle Deposition Systems and Processes
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M59 - Terminology for Silicon Technology
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Non-Member Price: $187.00