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SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E15 - Specification for Tool Load Port
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI S21 - Safety Guideline for Worker Protection
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI S14 - 半導体製造装置に対する火災リスクアセスメントと軽減のための安全ガイドライン
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI P5 - Specification for Pellicles
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI MF28 - Test Method for Minority Carrier Lifetime in Bulk Germanium and Silicon by Measurement of Photoconductivity Decay
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI MF26 - Test Method for Determining the Orientation of a Semiconductive Single Crystal
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI M85 - Guide for the Measurement of Trace Metal Contamination on Silicon Wafer Surface by Inductively Coupled Plasma Mass Spectrometry
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F101 - Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F60 - 不動態化した316Lステンレス・スチール部品の接ガス表面の組成をESCAにより評価する試験方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
FabView Subscription
Sale priceMember Price: $5,250.00
Non-Member Price: $7,800.00
Non-Member Price: $7,800.00
SEMI E99 - Specification for Carrier ID Reader/Writer
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E56 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E19 - Specification for Standard Mechanical Interface (SMIF)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E138 - Specification for XML Semiconductor Common Components
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E133 - Specification for Automated Process Control Systems Interface
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E125 - Specification for Equipment Self Description (EqSD)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water
Sale priceMember Price: $278.00
Non-Member Price: $369.00
Non-Member Price: $369.00
SEMI M92 - Specification for 4H-SIC Homoepitaxial Wafer
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
AI & Data Bundle
Sale priceMember Price: $90.00
Non-Member Price: $140.00
Non-Member Price: $140.00
SEMI108 FHE for Medical & Industrial Applications
Sale priceMember Price: $25.00
Non-Member Price: $45.00
Non-Member Price: $45.00