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F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle
SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Regular price$300.00 USD Sale price$193.00 USD
F01100 - SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials Regular price$300.00 USD Sale price$193.00 USD
F00100 - SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F1 - Specification for Leak Integrity of High-Purity Gas Piping Systems and Components Sale priceMember Price: $148.00
Non-Member Price: $193.00
F10800 - SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications Regular price$300.00 USD Sale price$193.00 USD
F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector
SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Sale priceMember Price: $148.00
Non-Member Price: $193.00
F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals Regular price$300.00 USD Sale price$193.00 USD
F102000 - SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials
SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials Regular price$300.00 USD Sale price$193.00 USD
F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube Regular price$300.00 USD Sale price$193.00 USD
E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09700 - SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces
SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture
SEMI E96 - Guide for CIM Framework Technical Architecture Sale priceMember Price: $148.00
Non-Member Price: $193.00
E09500 - SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment
SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA)
SEMI E89 - Guide for Measurement System Analysis (MSA) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08600 - SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component
SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08500 - SEMI E85 - Specification for Physical AMHS Stocker to Interbay Transport System Interoperability
SEMI E85 - Specification for Physical AMHS Stocker to Interbay Transport System Interoperability Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08100 - SEMI E81 - Provisional Specification for CIM Framework Domain Architecture
SEMI E81 - Provisional Specification for CIM Framework Domain Architecture Sale priceMember Price: $148.00
Non-Member Price: $193.00
E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps
SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Sale priceMember Price: $148.00
Non-Member Price: $193.00
E07300 - SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps
SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps Sale priceMember Price: $148.00
Non-Member Price: $193.00
E06400 - SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port Sale priceMember Price: $148.00
Non-Member Price: $193.00
E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05800 - SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05409 - SEMI E54.9 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP
SEMI E54.9 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05408 - SEMI E54.8 - Specification for Sensor/Actuator for Network Communications for PROFIBUS-DP
SEMI E54.8 - Specification for Sensor/Actuator for Network Communications for PROFIBUS-DP Sale priceMember Price: $148.00
Non-Member Price: $193.00