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SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F82 - Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F82 - 1.125インチタイプサーフェスマウント型ガス供給システム用マスフローコントローラ／マスフローメータの寸法のための仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI F8 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F8 - 引張り力を受けた場合のフロロカーボン製チューブ継手接合部のシール能力を評価する試験方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F7 - Test Method to Determine the Tensile Strength of Tube Fitting Connections Made of Fluorocarbon Materials Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System Regular price$300.00 USD Sale price$187.00 USD

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SEMI F6 - 危険ガス配管システムの二次封じ込め（ガイドライン） Regular price$360.00 USD Sale price$224.00 USD

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SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems Regular price$300.00 USD Sale price$187.00 USD

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SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals Regular price$300.00 USD Sale price$187.00 USD

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SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Regular price$300.00 USD Sale price$187.00 USD

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SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F52 - 半導体及びFPD製造の薬液供給システム用メトリックPFAチューブの寸法仕様 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F5 - Guide for Gaseous Effluent Handling Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F5 - ガス状廃棄物処理のガイドライン Regular price$360.00 USD Sale price$224.00 USD

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SEMI F46 - Sale priceMember Price: $171.00
Non-Member Price: $180.00

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SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems Regular price$300.00 USD Sale price$187.00 USD

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SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement Sale priceMember Price: $144.00
Non-Member Price: $187.00