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SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) Sale priceMember Price: $144.00
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SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces Sale priceMember Price: $144.00
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SEMI E97 - CIMフレームワークグローバル宣言および抽象インタフェースに関する暫定仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E96 - CIMフレームワークテクニカルアーキテクチャに関するガイド Sale priceMember Price: $171.00
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SEMI E96 - Guide for CIM Framework Technical Architecture Sale priceMember Price: $144.00
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SEMI E95 - Specification for Human Interface for Semiconductor Manufacturing Equipment Sale priceMember Price: $144.00
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SEMI E95 - 半導体製造装置のヒューマンインタフェースに関する仕様 Sale priceMember Price: $171.00
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SEMI E89 - 測定システム分析（MSA）のガイド Sale priceMember Price: $171.00
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SEMI E89 - Guide for Measurement System Analysis (MSA) Sale priceMember Price: $144.00
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SEMI E86 - CIMフレームワークファクトリ従業員コンポーネントに関する暫定仕様 Sale priceMember Price: $171.00
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SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component Sale priceMember Price: $144.00
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SEMI E85 - Specification for Physical AMHS Stocker to Interbay Transport System Interoperability Sale priceMember Price: $144.00
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SEMI E81 - Provisional Specification for CIM Framework Domain Architecture Sale priceMember Price: $144.00
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SEMI E81 - CIMフレームワークドメインアーキテクチャに関する暫定仕様 Sale priceMember Price: $171.00
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SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Sale priceMember Price: $144.00
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SEMI E74 - 真空ポンプのインタフェースの仕様　－　ターボモレキュラーポンプ Sale priceMember Price: $171.00
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SEMI E73 - 真空ポンプのインタフェースの仕様　－　ドライポンプ Sale priceMember Price: $171.00
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SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps Sale priceMember Price: $144.00
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SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port Sale priceMember Price: $144.00
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SEMI E64 - SEMI E15.1ドッキングインタフェースポートと300 mmカートの仕様 Sale priceMember Price: $171.00
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SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Sale priceMember Price: $171.00
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SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $144.00
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SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E58 - 自動化による信頼性，有用性，および整備性に関するスタンダード（ARAMS）：コンセプト，挙動，およびサービス Sale priceMember Price: $171.00
Non-Member Price: $224.00