Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI D16 - FPDマテリアルハンドリングシステムとツールポート間の機械的インタフェース仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI D16 - Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E1 - プラスチックおよびメタルのオープンウェーハキャリアの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E1.9 - 300 mmウェーハ搬送および保管用ウェーハカセットの機械仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E6 - Guide for Semiconductor Equipment Installation Documentation
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E6 - 半導体製造装置の設置に関する文書のガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
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Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI E10 - 半導体製造装置の信頼性,有用性,整備性(RAM),利用性の定義と測定のための仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E14 - Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E15 - Specification for Tool Load Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E15.1 - 300 mm装置ロードポートのための仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E15.1 - Specification for 300 mm Tool Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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