Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI F95 - 1.5インチタイプ4ファスナー構造サーフェスマウント型ガス供給システム用3ポートコンポーネントの寸法のための仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F95 - Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F96 - 液体CVD原料を入れるキャニスターのポート設定のための仕様
Regular price$360.00 USD
Sale price$231.00 USD
SEMI F97 - Specification for Facility Package Integration, Monitoring and Control
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing
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SEMI F98 - 半導体プロセスにおける用水再処理のためのガイド
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
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Sale price$193.00 USD
SEMI F101 - Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems
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SEMI F101 - ガス分配システムの圧力レギュレータの性能を決定するための試験方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F103 - ステンレススチール製液体原料容器(キャニスター)の形状の仕様
Regular price$360.00 USD
Sale price$231.00 USD
SEMI F104 - Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
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Non-Member Price: $193.00
Non-Member Price: $193.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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Non-Member Price: $193.00
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
Non-Member Price: $193.00
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