Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法
Regular price$360.00 USD
Sale price$231.00 USD
SEMI F13 - Guide for Gas Source Control Equipment
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures
Regular price$300.00 USD
Sale price$193.00 USD
SEMI F15 - Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
Sale price
Member Price : $148.00
SEMI F15 - 筐体の試験方法(六フッ化硫黄のトレーサガス)のSEMI S6への移行
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F18 - Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F19 - Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F20 - Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI F20 - 用于通用、高纯和超高纯半导体制造组件的316L不锈钢棒材、锻材、挤压型材、板材和管材的规范
Sale priceMember Price: $286.00
Non-Member Price: $380.00
Non-Member Price: $380.00
SEMI F20 - 高純度および超高純度の半導体製造アプリケーションで使用される汎用コンポーネント用の316Lステンレス鋼の棒鋼,鍛造品,押出成形品,鋼板,鋼管の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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