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Standards

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $170 USD and $335 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing.

Historical Standards are available here.

Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic and Language below. 

SEMI C10 - Guide for Determination of Method Detection Limits
SEMI C10 - MDL（定量下限値）決定に関するガイド
SEMI C14 - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
SEMI C15 - PPMおよびPPB水分標準のためのテスト方法
SEMI C15 - Test Method for ppm and ppb Humidity Standards
SEMI C16 - Guide for Precision and Data Reporting Practices
SEMI C18 - Specification for Acetic Acid
SEMI C19 - Specification for Acetone
SEMI C20 - Specification and Guide for Ammonium Fluoride 40%
SEMI C21 - Specification and Guide for Ammonium Hydroxide
SEMI C21 - 水酸化アンモニウムの仕様とガイドライン
SEMI C22 - Guide for Boron Tribromide
SEMI C23 - Specification for Buffered Oxide Etchants
SEMI C24 - Specification for n-Butyl Acetate
SEMI C25 - Specification for Dichloromethane (Methylene Chloride)
SEMI C26 - Specification and Guide for Hexamethyldisilazane (HMDS)
SEMI C27 - Specification and Guide for Hydrochloric Acid
SEMI C28 - Specification and Guide for Hydrofluoric Acid
SEMI C28 - フッ化ケイ素酸の仕様
SEMI C29 - 4.9%フッ化ケイ素酸（10:1 V/V）の仕様とガイドライン
SEMI C29 - Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
SEMI C30 - Specification for Hydrogen Peroxide
SEMI C30 - 過酸化水素の仕様
SEMI C31 - Specification for Methanol
SEMI C32 - Specification for Methyl Ethyl Ketone
SEMI C32 - メチルエチルケトンの仕様
SEMI C33 - Specifications for n-Methyl 2-Pyrrolidone
SEMI C34 - Specification and Guide for Mixed Acid Etchants
SEMI C35 - Specification and Guide for Nitric Acid
SEMI C36 - Specification for Phosphoric Acid
SEMI C37 - Specification for Phosphoric Etchants
SEMI C37 - りん腐食剤の仕様
SEMI C38 - Guideline for Phosphorus Oxychloride
SEMI C39 - Specification for Potassium Hydroxide Pellets
SEMI C40 - Specification for Potassium Hydroxide, 45% Solution
SEMI C40 - 水酸化カリウム45%溶液の仕様
SEMI C41 - 2-プロパノールの仕様とガイドライン
SEMI C41 - Specification and Guide for 2-Propanol
SEMI C42 - Specification for Sodium Hydroxide Pellets
SEMI C42 - 水酸化ナトリウム（固体）の仕様
SEMI C43 - Specification for Sodium Hydroxide, 50% Solution
SEMI C43 - 水酸化ナトリウム50%溶液の仕様
SEMI C44 - Specification and Guide for Sulfuric Acid
SEMI C45 - Specification and Guide for Tetraethylorthosilicate (TEOS)
SEMI C45 - テトラエトキシシラン (TEOS) ガイドラインと仕様
SEMI C46 - 25%テトラメチル水酸化アンモニウムのガイド
SEMI C46 - Guide for 25% Tetramethylammonium Hydroxide
SEMI C47 - Guide for Trans 1,2 Dichloroethylene
SEMI C47 - トランス1，2ジクロロエチレンのガイドライン
SEMI C48 - Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade
SEMI C49 - Guide for Trimethylborate
SEMI C49 - トリメチルホウ酸のガイド
SEMI C50 - Guide for Trimethylphosphite
SEMI C50 - トリメチルホスフィンのガイド
SEMI C51 - Specification for Xylenes
SEMI C52 - Specification for the Shelf Life of a Specialty Gas
SEMI C52 - 特殊ガスの貯蔵寿命に関する仕様
SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]
SEMI C53 - ジメチルスルホキシド（DMSO）[グレード1および2]の仕様
SEMI C54 - Specification for Oxygen
SEMI C55 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality
SEMI C56 - Specification for Dichlorosilane
SEMI C57 - Specification for Argon
SEMI C58 - Specification for Hydrogen
SEMI C59 - Specification for Nitrogen
SEMI C60 - Specification for Nitrous Oxide
SEMI C61 - Specification for Bar-Code Container Identification
SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes
SEMI C63 - Specification for Organosilicate Precursors Used in Low K CVD Processes
SEMI C64 - SEMI Statistical Guidelines for Ship To Control
SEMI C64 - 統計的出荷管理に関するSEMIガイドライン
SEMI C65 - Guide for Trimethylsilane (3MS), 99.995% Quality
SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality
SEMI C67 - Guide for Hafnium Amides
SEMI C68 - Guide for Zirconium Amides
SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI C69 - ポリマーペレットの表面積を測定するための試験方法
EMI C70 - Specification for Tungsten Hexafluoride
EMI C70 - 六フッ化タングステン（WF6）の仕様
SEMI C71 - Specification and Guide for Boron Trichloride (BCI3)
SEMI C71 - 三塩化ホウ素（BCI3）の仕様およびガイド
EMI C72 - Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA
SEMI C73 - Guide for Hafnium Chloride
SEMI C74 - Guide for Hafnium Tert-Butoxide
SEMI C75 - Guide for Tetrakis(Dimethylamino)Titanium
SEMI C76 - Guide for Zirconium Tert-Butoxide
SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm
SEMI C77 - 最小可測粒径が30nmから100nmの範囲にある液中パーティクルカウンタの計数効率を求める試験方法
SEMI C78 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy
SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS)
SEMI C81 - Guide for Tris(Dimethylamino) Silane (3DMAS)
SEMI C82 - Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter
SEMI C83 - PFA融着継手で作られる融着接合部に加える引っ張り強度のための試験方法
SEMI C83 - Test Method for Tensile Strength Applied to Welded Connections Made by PFA Weld Fitting
SEMI C84 - Guide for Cyclopentanone
SEMI C85 - Guide for Methyl Isobutyl Carbinol (MIBC)
SEMI C86 - Guide for Ethylene Glycol
SEMI C87 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry
SEMI C88 - Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems