Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality
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Non-Member Price: $193.00
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SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality
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Non-Member Price: $193.00
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SEMI C3.27 - Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality
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Non-Member Price: $193.00
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SEMI C3.27 - 三フッ化ホウ素(BF3),シリンダ充填, 99.0%品質の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
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SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality
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SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality
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SEMI C3.30 - Standard for Hydrogen (H2), Bulk, 99.9997% Quality
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SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional)
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SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality
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SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional)
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SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality
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SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality
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SEMI C3.35 - 塩化水素(HCl),品質99.997%の仕様
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SEMI C3.36 - Standard for Hydrogen Chloride (HCl), 99.994% Quality (Provisional)
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SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMIViews
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