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SEMI P41 - Specification for Mask Defect Data Handling with XML, Between Defect Inspection Tools, Repair Tools, and Review Tools
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P35 - Terminology for Microlithography Metrology
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P34 - Specification for 230 mm Square Photomask Substrates
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P32 - Test Method for Determination of Trace Metals in Photoresist
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P26 - Parameter Checklist for Photoresist Sensitivity Measurement
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P23 - Guidelines for Programmed Defect Masks and Benchmark Procedures for Sensitivity Analysis of Mask Defect Inspection Systems
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P21 - Guidelines for Precision and Accuracy Expression for Mask Writing Equipment
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P19 - Specification for Metrology Pattern Cells for Integrated Circuit Manufacture
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI G84 - Specification for Strip Map Protocol
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F71 - ガス供給システムの温度サイクル試験方法
Regular price$300.00 USD
Sale price$231.00 USD
SEMI F40 - 化学試験のための薬液分配部品の準備についての作業方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F37 - ガス供給システム構成部品の表面粗さパラメータの算出方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F29 - ガスソースシステムパネルのパージ効果のテスト方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI F20 - 高純度および超高純度の半導体製造アプリケーションで使用される汎用コンポーネント用の316Lステンレス鋼の棒鋼，鍛造品，押出成形品，鋼板，鋼管の仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M52 - 130 nm，90nm，65nmおよび45nm技術世代シリコンウェーハ用走査型表面検査装置仕様のためのガイド
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI M39 - Test Method for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility in Semi-Insulating GaAs Single Crystals
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M32 - Guide to Statistical Specifications
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M3 - Specifications for Polished Monocrystalline Sapphire Substrates
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI M13 - シリコンウェーハの英数字マーキングの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E99 - キャリアIDリーダ／ライタ機能スタンダード：コンセプト，挙動，およびサービスに関する仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E66 - マスフローコントローラのパーティクル発生測定のテスト方法
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00