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SEMI MS7 - Specification for Microfluidic Interfaces to Electronic Device Packages Regular price$300.00 USD Sale price$187.00 USD

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SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems Regular price$300.00 USD Sale price$187.00 USD

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SEMI MS8 - Guide to Evaluating Hermeticity of Microelectromechanical Systems (MEMS) Packages Regular price$300.00 USD Sale price$187.00 USD

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SEMI MS5 - Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI MS3 - Terminology for MEMS Technology Sale priceMember Price: $144.00
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SEMI MS2 - Test Method for Step Height Measurements of Thin Films Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI MS1 - Guide to Specifying Wafer-Wafer Bonding Alignment Targets Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E99 - キャリアIDリーダ／ライタ機能スタンダード：コンセプト，挙動，およびサービスに関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E91 - プローバ独自の装置モデル（PSEM）に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E90 - 기판 추적 사양 Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E90 - 基板トラッキングの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E88 - AMHS保管SEM（ストッカーSEM）の仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E87 - 캐리어 관리 사양 Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E87 - キャリア管理（CMS）のための仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E85 - ベイ間搬送システム用AMHSストッカーの共用性に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E84 - エンハンストキャリア移載パラレルI/Oインタフェースの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E82 - 工程間／工程内AMHS SEMの仕様（IBSEM） Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E72 - 300 mm装置の床面積，高さ，重量の仕様ならびにガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E67 - マスフローコントローラの信頼性測定のためのテスト方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E66 - マスフローコントローラのパーティクル発生測定のテスト方法 Sale priceMember Price: $171.00
Non-Member Price: $224.00