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SEMI E86 - Provisional Specification for CIM Framework Factory Labor Component Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E85 - Specification for Physical AMHS Stocker to Interbay Transport System Interoperability Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E81 - Provisional Specification for CIM Framework Domain Architecture Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E81 - CIMフレームワークドメインアーキテクチャに関する暫定仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E74 - 真空ポンプのインタフェースの仕様　－　ターボモレキュラーポンプ Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E73 - 真空ポンプのインタフェースの仕様　－　ドライポンプ Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E64 - SEMI E15.1ドッキングインタフェースポートと300 mmカートの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E58 - 自動化による信頼性，有用性，および整備性に関するスタンダード（ARAMS）：コンセプト，挙動，およびサービス Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E54.9 - TCP/IPでのMODBUS/TCPのためのセンサ／アクチュエータ・ネットワーク通信に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E54.9 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E54.8 - Specification for Sensor/Actuator for Network Communications for PROFIBUS-DP Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E54.8 - PROFIBUSのためのセンサ／アクチュエータネットワーク通信に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E54.16 - Specification for Sensor/Actuator Network Communications for LonWorks Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E54.16 - LONWORKSによるセンサ／アクチュエータネットワーク通信の仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E54.15 - SafetyBUS p用センサ／アクチュエータ・ネットワーク通信に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E54.15 - Specification for Sensor/Actuator Network Communications for SafetyBUS p Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E54.14 - Specification for Sensor/Actuator Network Communications for PROFINET Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E54.14 - PROFINET用センサ／アクチュエータネットワーク通信に関する仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00