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SEMI F66 - Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals Regular price$300.00 USD Sale price$187.00 USD

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SEMI F66 - ステンレス製薬液容器のポート標記及び記号の仕様 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F65 - ミリサイズのPFAチューブとともに使用するダイアフラムバルブの取付ベースの寸法仕様 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Regular price$300.00 USD Sale price$187.00 USD

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SEMI F58 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F58 - 大気圧イオン化質量分析計（APIMS）による表面実装および一般的ガス供給システムの水分ドライダウン特性測定のためのテスト方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F52 - 半導体及びFPD製造の薬液供給システム用メトリックPFAチューブの寸法仕様 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F5 - Guide for Gaseous Effluent Handling Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F5 - ガス状廃棄物処理のガイドライン Regular price$360.00 USD Sale price$224.00 USD

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SEMI F46 - Sale priceMember Price: $171.00
Non-Member Price: $180.00

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SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems Regular price$300.00 USD Sale price$187.00 USD

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SEMI F4 - Specification for Pneumatically Actuated Cylinder Valves Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F35 - 非浸入式酸素測定を使用した超高純度ガス分配システムの安全性を確認するためのテスト方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F33 - 気圧イオン化質量分析計（APIMS）の較正のためのテスト方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F33 - Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F27 - ガス配分システムおよび部品の水分相互作用および含有量の大気圧電離質量分析（APIMS）による，テスト方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F18 - Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures Regular price$300.00 USD Sale price$187.00 USD

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SEMI F13 - Guide for Gas Source Control Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法 Regular price$360.00 USD Sale price$224.00 USD

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SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle Regular price$300.00 USD Sale price$187.00 USD