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SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E161 - Guide for Identification and Classification of Training Tiers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E161 - トレーニング階層の明確化および分類に関するガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E15 - Specification for Tool Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E15.1 - Specification for 300 mm Tool Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E15.1 - 300 mm装置ロードポートのための仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E147 - 装置データ取得（EDA）のためのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E147 - Guide for Equipment Data Acquisition (EDA) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E144 - Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E141 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology Sale priceMember Price: $144.00
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SEMI E139 - Specification for Recipe and Parameter Management (RaP) Sale priceMember Price: $144.00
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SEMI E131 - Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E127 - 装置組込み計測モジュール通信の仕様：概念，挙動，サービス（IMMC） Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E124 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E124 - 総合工場効率（OFE）およびその他の工場レベルの生産性測定基準の定義とその計算法についてのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E119 - 300 mmウェーハの工場間輸送用狭ピッチフロントオープニングボックス（FOBIT）の機械仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E119 - Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm Wafers Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E118 - ウェーハIDリーダ通信インタフェースの仕様 — ウェーハIDリーダの機能スタンダード: 概念，動作，サービス Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy Sale priceMember Price: $144.00
Non-Member Price: $187.00