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G08000 - SEMI G80 - Test Method for the Analysis of Overall Digital Timing Accuracy for Automated Test Equipment
P04300 - SEMI P43 - Photomask Qualification Terminology
SEMI P43 - Photomask Qualification Terminology Sale priceMember Price: $144.00
Non-Member Price: $187.00
P04100 - SEMI P41 - Specification for Mask Defect Data Handling with XML, Between Defect Inspection Tools, Repair Tools, and Review Tools
P03500 - SEMI P35 - Terminology for Microlithography Metrology
SEMI P35 - Terminology for Microlithography Metrology Sale priceMember Price: $144.00
Non-Member Price: $187.00
F09800 - SEMI F98 - 半導体プロセスにおける用水再処理のためのガイド
SEMI F98 - 半導体プロセスにおける用水再処理のためのガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
MF172300 - SEMI MF1723 - Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy
M07300 - SEMI M73 - 測定したウェーハエッジプロファイルから直接的関連性ある特性を抽出するテスト方法
E05200 - SEMI E52 - Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers
E04900 - SEMI E49 - 高純度および超高純度配管システムの性能,サブアセンブリ,最終組立のためのガイド
S02800 - SEMI S28 - 半導体製造装置用ロボットおよびロードポートの安全ガイドライン
S02700 - SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
S02400 - SEMI S24 - Safety Guideline for Multi-Employer Work Areas
SEMI S24 - Safety Guideline for Multi-Employer Work Areas Sale priceMember Price: $144.00
Non-Member Price: $187.00
S01800 - SEMI S18 - 矽烷族氣體處理之安全衛生及環保基準
SEMI S18 - 矽烷族氣體處理之安全衛生及環保基準 Sale priceMember Price: $144.00
Non-Member Price: $187.00
S01200 - SEMI S12 - 設備除污基準
SEMI S12 - 設備除污基準 Sale priceMember Price: $144.00
Non-Member Price: $187.00
F00800 - SEMI F8 - Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces
F00700 - SEMI F7 - Test Method to Determine the Tensile Strength of Tube Fitting Connections Made of Fluorocarbon Materials
F05200 - SEMI F52 - Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing
F02700 - SEMI F27 - Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
F01100 - SEMI F11 - Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
E08100 - SEMI E81 - Provisional Specification for CIM Framework Domain Architecture
SEMI E81 - Provisional Specification for CIM Framework Domain Architecture Sale priceMember Price: $144.00
Non-Member Price: $187.00
E06400 - SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port Sale priceMember Price: $144.00
Non-Member Price: $187.00
E05300 - SEMI E53 - Event Reporting
SEMI E53 - Event Reporting Sale priceMember Price: $144.00
Non-Member Price: $187.00
E04701 - SEMI E47.1 - 300 mmウェーハ搬送および保管用FOUPの機械仕様
SEMI E47.1 - 300 mmウェーハ搬送および保管用FOUPの機械仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS)