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SEMI F89 - Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F85 - Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F84 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F83 - Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F71 - Test Method for Temperature Cycle of Gas Delivery System
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F35 - Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
Regular price$300.00 USD
Sale price$187.00 USD
SEMI E96 - Guide for CIM Framework Technical Architecture
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E95 - 半導体製造装置のヒューマンインタフェースに関する仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E89 - 測定システム分析（MSA）のガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E48 - Specification for SMIF Indexer Volume Requirement
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E47 - Specification for 150 mm/200 mm Pod Handles
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E41 - Exception Management (EM) Standard
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E36 - Semiconductor Equipment Manufacturing Information Tagging Specification
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E15.1 - 300 mm装置ロードポートのための仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E119 - Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm Wafers
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E102 - Provisional Specification for CIM Framework Material Transport and Storage Component
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E101 - EFEM機能構造モデルのガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI T20 - Specification for Authentication of Semiconductors and Related Products
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00