Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E54.20 - EtherCAT用センサ/アクチュエータネットワーク通信に関するスタンダード
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SEMI E54.21 - MOTIONNET®用センサ/アクチュエータネットワーク(SAN)通信に関する仕様
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SEMI E56 - 熱マスフローコントローラの精度,直線性,リピータビリティ,短期再現性,ヒステリシス(履歴現象)およびデッドバンドを判断するテスト方法
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Non-Member Price: $231.00
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SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様
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Non-Member Price: $231.00
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SEMI E58 - 自動化による信頼性,有用性,および整備性に関するスタンダード(ARAMS):コンセプト,挙動,およびサービス
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SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース(FIMS)の仕様
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SEMI E63 - 300 mmボックスオープナ/ローダーと装置間のスタンダード(BOLTS-M)インタフェースの機械的仕様
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SEMI E64 - SEMI E15.1ドッキングインタフェースポートと300 mmカートの仕様
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SEMI E66 - マスフローコントローラのパーティクル発生測定のテスト方法
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SEMI E67 - マスフローコントローラの信頼性測定のためのテスト方法
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SEMI E72 - 300 mm装置の床面積,高さ,重量の仕様ならびにガイド
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SEMI E73 - 真空ポンプのインタフェースの仕様 - ドライポンプ
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SEMI E74 - 真空ポンプのインタフェースの仕様 - ターボモレキュラーポンプ
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SEMI E77 - マスフローコントローラの換算率の代用ガス使用による計算方法
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SEMI E78 - 装置のための静電気放電(ESD)と静電気吸着(ESA)の評価と管理へのガイド
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
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