Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E132 - 장비클라이언트 인증과 권한 부여에 대한 사양
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SEMI E133 - Specification for Automated Process Control Systems Interface
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SEMI E133 - 自動プロセス制御システムインタフェースの仕様
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SEMI E134 - Specification for Data Collection Management
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SEMI E134 - データ収集管理の仕様
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SEMI E134 - 데이터 수집 관리 사양
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SEMI E138 - Specification for XML Semiconductor Common Components
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SEMI E138 - 半導体生産系で共通に使われる情報の構成要素のXML表現
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SEMI E139 - Specification for Recipe and Parameter Management (RaP)
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SEMI E139 - レシピとパラメータに関する管理の規定(RaP)
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SEMI E142 - Specification for Substrate Mapping
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SEMI E142 - 基板マッピングの仕様
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SEMI E145 - Classification for Measurement Unit Symbols in XML
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SEMI E145 - XMLにおける測定単位記号に関する分類
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SEMI E147 - Guide for Equipment Data Acquisition (EDA)
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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