Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E139 - Specification for Recipe and Parameter Management (RaP)
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SEMI E139 - レシピとパラメータに関する管理の規定(RaP)
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SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
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SEMI E141 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology
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SEMI E142 - Specification for Substrate Mapping
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SEMI E142 - 基板マッピングの仕様
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SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法
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SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle
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SEMI E144 - Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment
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SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様
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SEMI E145 - Classification for Measurement Unit Symbols in XML
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SEMI E145 - XMLにおける測定単位記号に関する分類
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SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers
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SEMI E147 - Guide for Equipment Data Acquisition (EDA)
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SEMI E147 - 装置データ取得(EDA)のためのガイド
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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