Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
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SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様
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SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
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SEMI E150 - Guide for Equipment Training Best Practices
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SEMI E151 - Guide for Understanding Data Quality
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SEMI E151 - データ品質を理解するためのガイド
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SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
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SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
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SEMI E153 - AMHS SEMの仕様(AMHS SEM)
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SEMI E153 - Specification for AMHS SEM (AMHS SEM)
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SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様
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SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
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SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
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Sale price$193.00 USD
SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様
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SEMI E157 - Specification for Module and Substrate Process Tracking
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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Non-Member Price: $193.00
Non-Member Price: $193.00
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