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F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water
SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water Sale priceMember Price: $286.00
Non-Member Price: $380.00
F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse
SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port
SEMI E15.1 - Specification for 300 mm Tool Load Port Sale priceMember Price: $148.00
Non-Member Price: $193.00
F10100 - SEMI F101 - Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems
SEMI F101 - Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems Sale priceMember Price: $148.00
Non-Member Price: $193.00
E19100 - SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting
SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting Sale priceFrom $380.00 USD
F00500 - SEMI F5 - Guide for Gaseous Effluent Handling
SEMI F5 - Guide for Gaseous Effluent Handling Sale priceMember Price: $148.00
Non-Member Price: $193.00
E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA)
SEMI E89 - Guide for Measurement System Analysis (MSA) Sale priceMember Price: $148.00
Non-Member Price: $193.00
S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Sale priceMember Price: $148.00
Non-Member Price: $193.00
C03000 - SEMI C30 - Specification and Guide for Hydrogen Peroxide
SEMI C30 - Specification and Guide for Hydrogen Peroxide Sale price Member Price : $148.00
E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port
SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port Sale priceMember Price: $148.00
Non-Member Price: $193.00
A00300 - SEMI A3 - Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI A3 - Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI) Sale priceMember Price: $286.00
Non-Member Price: $380.00
E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01500 - SEMI E15 - Specification for Tool Load Port
SEMI E15 - Specification for Tool Load Port Sale priceMember Price: $148.00
Non-Member Price: $193.00
F03200 - SEMI F32 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
SEMI F32 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves Sale priceMember Price: $148.00
Non-Member Price: $193.00
E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers Sale priceMember Price: $148.00
Non-Member Price: $193.00
C02800 - SEMI C28 - Specification and Guide for Hydrofluoric Acid
SEMI C28 - Specification and Guide for Hydrofluoric Acid Sale priceMember Price: $148.00
Non-Member Price: $193.00
3D00400 - SEMI 3D4 - Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks
SEMI 3D4 - Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks Sale priceMember Price: $148.00
Non-Member Price: $193.00
C09800 - SEMI C98 - Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting Used in Semiconductor Manufacturing
SEMI C98 - Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting Used in Semiconductor Manufacturing Sale priceMember Price: $148.00
Non-Member Price: $193.00
S00600 - SEMI S6 - 반도체 제조 장비 배기 환기의 EHS 가이드라인
SEMI S6 - 반도체 제조 장비 배기 환기의 EHS 가이드라인 Sale priceMember Price: $148.00
Non-Member Price: $193.00
S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment Sale priceMember Price: $148.00
Non-Member Price: $193.00
F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures
SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures Regular price$300.00 USD Sale price$193.00 USD
E04200 - SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services Sale priceMember Price: $148.00
Non-Member Price: $193.00
MF052300 - SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces
SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces Sale priceMember Price: $148.00
Non-Member Price: $193.00
E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)
SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Sale priceMember Price: $148.00
Non-Member Price: $193.00