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F00500 - SEMI F5 - Guide for Gaseous Effluent Handling
SEMI F5 - Guide for Gaseous Effluent Handling Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01500 - SEMI E15 - Specification for Tool Load Port
SEMI E15 - Specification for Tool Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00
S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Sale priceMember Price: $144.00
Non-Member Price: $187.00
F03100 - SEMI F31 - Guide for Bulk Chemical Distribution Systems
SEMI F31 - Guide for Bulk Chemical Distribution Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)
SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Sale priceMember Price: $144.00
Non-Member Price: $187.00
C06900 - SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets Sale priceMember Price: $144.00
Non-Member Price: $187.00
3D00400 - SEMI 3D4 - Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks
F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse
E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA)
SEMI E89 - Guide for Measurement System Analysis (MSA) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E04200 - SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services Sale priceMember Price: $144.00
Non-Member Price: $187.00
MF052300 - SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces
SEMI MF523 - Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces Sale priceMember Price: $144.00
Non-Member Price: $187.00
M09100 - SEMI M91 - Test Method for Determination of Threading Screw Dislocation Density in 4H-SIC by X-Ray Topography
E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port
SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00
S00600 - SEMI S6 - 반도체 제조 장비 배기 환기의 EHS 가이드라인
SEMI S6 - 반도체 제조 장비 배기 환기의 EHS 가이드라인 Sale priceMember Price: $278.00
Non-Member Price: $187.00
S02800 - SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems
F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures
SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures Regular price$300.00 USD Sale price$187.00 USD
E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
E16400 - SEMI E164 - Specification for EDA Common Metadata
SEMI E164 - Specification for EDA Common Metadata Sale priceMember Price: $144.00
Non-Member Price: $187.00
C02800 - SEMI C28 - Specification and Guide for Hydrofluoric Acid
SEMI C28 - Specification and Guide for Hydrofluoric Acid Sale priceMember Price: $144.00
Non-Member Price: $187.00
E19100 - SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting
SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting Sale priceMember Price: $278.00
Non-Member Price: $369.00
F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water
SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water Sale priceMember Price: $278.00
Non-Member Price: $369.00
A00400 - SEMI A4 - Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS)