Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E52 - デジタルマスフローコントローラで使用されるガス,ガス混合物および気化して使用する材料の参照表
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Non-Member Price: $231.00
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SEMI E56 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
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SEMI E56 - 熱マスフローコントローラの精度,直線性,リピータビリティ,短期再現性,ヒステリシス(履歴現象)およびデッドバンドを判断するテスト方法
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Non-Member Price: $231.00
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SEMI E57 - 300 mmウェーハキャリアの位置決めおよび支持のために使用されるキネマティックカプリングの機械仕様
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Non-Member Price: $231.00
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SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
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Non-Member Price: $193.00
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SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース(FIMS)の仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
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Non-Member Price: $193.00
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SEMI E63 - 300 mmボックスオープナ/ローダーと装置間のスタンダード(BOLTS-M)インタフェースの機械的仕様
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Non-Member Price: $231.00
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SEMI E63 - Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E64 - SEMI E15.1ドッキングインタフェースポートと300 mmカートの仕様
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Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E64 - Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E66 - Test Method for Determining Particle Contribution by Mass Flow Controllers
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SEMI E66 - マスフローコントローラのパーティクル発生測定のテスト方法
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SEMI E67 - Test Method for Determining Reliability of Mass Flow Controller
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SEMI E67 - マスフローコントローラの信頼性測定のためのテスト方法
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Non-Member Price: $231.00
Non-Member Price: $231.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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