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SEMI F97 - Specification for Facility Package Integration, Monitoring and Control
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F98 - Guide for Treatment of Reuse Water in Semiconductor Processing
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F98 - 半導体プロセスにおける用水再処理のためのガイド
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F101 - Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F101 - ガス分配システムの圧力レギュレータの性能を決定するための試験方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F103 - ステンレススチール製液体原料容器（キャニスター）の形状の仕様
Regular price$360.00 USD
Sale price$224.00 USD
SEMI F104 - Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F104 - 超純水および液体化学薬品分配システムに使用されるコンポーネント評価のためのパーティクル試験方法ガイドライン
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI F105 - Guide for Metallic Material Compatibility in Gas Distribution Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F106 - ヘリウム漏れ検出器によるガス供給システムの漏れ完全性を確認するためのテスト方法
Regular price$360.00 USD
Sale price$224.00 USD
SEMI F107 - Guide for Process Equipment Adapter Plates
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
Regular price$300.00 USD
Sale price$187.00 USD
SEMI F109 - Guide for Heater Systems Requirements
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F110 - Test Method for Mono-Dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F112 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F113 - Test Method for Pressure Transducers Used in Gas Delivery Systems
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00