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E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM)
SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E16900 - SEMI E169 - Guide for Equipment Information System Security
SEMI E169 - Guide for Equipment Information System Security Sale priceMember Price: $144.00
Non-Member Price: $187.00
E12000 - SEMI E120 - Specification for the Common Equipment Model (CEM)
SEMI E120 - Specification for the Common Equipment Model (CEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E18500 - SEMI E185 - Specification for 300 mm Tape Frame FOUP
SEMI E185 - Specification for 300 mm Tape Frame FOUP Sale priceMember Price: $144.00
Non-Member Price: $187.00
P03700 - SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks
SEMI P37 - Specification for Extreme Ultraviolet Lithography Substrates and Blanks Sale priceMember Price: $144.00
Non-Member Price: $187.00
F05100 - SEMI F51 - Guide for Elastometric Sealing Technology
SEMI F51 - Guide for Elastometric Sealing Technology Sale priceMember Price: $144.00
Non-Member Price: $187.00
E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility
E18000 - SEMI E180 - Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing
E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port
SEMI E15.1 - Specification for 300 mm Tool Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00
S01800 - SEMI S18 - Environmental, Health and Safety Guideline for Flammable Silicon Compounds
SEMI S18 - Environmental, Health and Safety Guideline for Flammable Silicon Compounds Sale priceMember Price: $144.00
Non-Member Price: $187.00
F10500 - SEMI F105 - Guide for Metallic Material Compatibility in Gas Distribution Systems
SEMI F105 - Guide for Metallic Material Compatibility in Gas Distribution Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00
C03000 - SEMI C30 - Specification and Guide for Hydrogen Peroxide
E01500 - SEMI E15 - Specification for Tool Load Port
SEMI E15 - Specification for Tool Load Port Sale priceMember Price: $144.00
Non-Member Price: $187.00
T00500 - SEMI T5 - Specification for Alphanumeric Marking of Round Compound Semiconductor Wafers
S00500 - SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases Sale priceMember Price: $144.00
Non-Member Price: $187.00
E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)
SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Sale priceMember Price: $144.00
Non-Member Price: $187.00
C06900 - SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets Sale priceMember Price: $144.00
Non-Member Price: $187.00
3D00400 - SEMI 3D4 - Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks
F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse
C09800 - SEMI C98 - Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting Used in Semiconductor Manufacturing
F00500 - SEMI F5 - Guide for Gaseous Effluent Handling
SEMI F5 - Guide for Gaseous Effluent Handling Sale priceMember Price: $144.00
Non-Member Price: $187.00
E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA)
SEMI E89 - Guide for Measurement System Analysis (MSA) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E04200 - SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services Sale priceMember Price: $144.00
Non-Member Price: $187.00