Individual Standards

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1213 products

MS00900 - SEMI MS9 - Specification for High Density Permanent Connections Between Microfluidic Devices
MS00700 - SEMI MS7 - Specification for Microfluidic Interfaces to Electronic Device Packages
MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems
MS00800 - SEMI MS8 - Guide to Evaluating Hermeticity of Microelectromechanical Systems (MEMS) Packages
MS00500 - SEMI MS5 - Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures
MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance
MS00300 - SEMI MS3 - Terminology for MEMS Technology
SEMI MS3 - Terminology for MEMS Technology Sale priceMember Price: $144.00
Non-Member Price: $187.00
MS00200 - SEMI MS2 - Test Method for Step Height Measurements of Thin Films
SEMI MS2 - Test Method for Step Height Measurements of Thin Films Sale priceMember Price: $144.00
Non-Member Price: $187.00
MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions
SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions Sale priceMember Price: $144.00
Non-Member Price: $187.00
MS00100 - SEMI MS1 - Guide to Specifying Wafer-Wafer Bonding Alignment Targets
SEMI MS1 - Guide to Specifying Wafer-Wafer Bonding Alignment Targets Sale priceMember Price: $144.00
Non-Member Price: $187.00
MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials
SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials Sale priceMember Price: $144.00
Non-Member Price: $187.00
E00400 - SEMI E4 - 半導体製造装置通信スタンダード1 メッセージトランスファ(SECS-I)
E03700 - SEMI E37 - 高速SECSメッセージサービス(HSMS)汎用サービス
SEMI E37 - 高速SECSメッセージサービス(HSMS)汎用サービス Sale priceMember Price: $334.00
Non-Member Price: $444.00
E03000 - SEMI E30 - 製造装置の通信およびコントロールのための包括的モデル(GEM)
E15400 - SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様
A00200 - SEMI A2 - Specification for Surface Mount Assembler Smart Hookup (SMASH)
SEMI A2 - Specification for Surface Mount Assembler Smart Hookup (SMASH) Sale priceMember Price: $144.00
Non-Member Price: $187.00
S00800 - SEMI S8 - 半導體製造設備人因工程之安全基準
SEMI S8 - 半導體製造設備人因工程之安全基準 Sale priceMember Price: $278.00
Non-Member Price: $369.00
S00700 - SEMI S7 - 半導體製造設備的安全衛生及環保評估報告之安全基準
SEMI S7 - 半導體製造設備的安全衛生及環保評估報告之安全基準 Sale priceMember Price: $144.00
Non-Member Price: $187.00
S00600 - SEMI S6 - 半導體製造設備排氣通風基準
SEMI S6 - 半導體製造設備排氣通風基準 Sale priceMember Price: $278.00
Non-Member Price: $369.00
S00500 - SEMI S5 - 氣體鋼瓶限流裝置尺寸估量及鑑定之安全基準
SEMI S5 - 氣體鋼瓶限流裝置尺寸估量及鑑定之安全基準 Sale priceMember Price: $144.00
Non-Member Price: $187.00
S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets
S00400 - SEMI S4 - 分配キャビネット内に格納される化学物質シリンダの分離のための安全ガイドライン
S00400 - SEMI S4 - 供應櫃內化學品鋼瓶隔離之安全基準
SEMI S4 - 供應櫃內化學品鋼瓶隔離之安全基準 Sale priceMember Price: $144.00
Non-Member Price: $187.00
S00300 - SEMI S3 - 製程液體加熱系統安全基準
SEMI S3 - 製程液體加熱系統安全基準 Sale priceMember Price: $144.00
Non-Member Price: $187.00
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