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SEMI P3 - Specification for Photoresist/E-Beam Resist for Hard Surface Photoplates Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P30 - Practice for Catalog Publication of Critical Dimension Measurement Scanning Electron Microscopes (CD-SEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P27 - 基板上のレジスト膜厚の測定用パラメータチェックリスト Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P26 - フォトレジストの感度測定用パラメータチェックリスト Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P26 - Parameter Checklist for Photoresist Sensitivity Measurement Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P25 - 焦点深度および最適焦点深度（仕様） Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P25 - Specification for Measuring Depth of Focus and Best Focus Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P24 - CD測長手順 Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P24 - CD Metrology Procedures Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P23 - プログラム欠陥マスクおよびマスク欠陥検査システムの感度分析ベンチマーク手順についてのガイドライン Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P23 - Guidelines for Programmed Defect Masks and Benchmark Procedures for Sensitivity Analysis of Mask Defect Inspection Systems Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P21 - Guidelines for Precision and Accuracy Expression for Mask Writing Equipment Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P21 - マスク描画装置の精度表示のガイドライン Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P2 - ハードサーフェス・フォトマスク用クロムブランク Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P2 - Specification for Chrome Thin Films for Hard Surface Photomasks Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P19 - 集積回路製造用メトロロジパターンセル Sale priceMember Price: $171.00
Non-Member Price: $224.00

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SEMI P19 - Specification for Metrology Pattern Cells for Integrated Circuit Manufacture Sale priceMember Price: $144.00
Non-Member Price: $187.00

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SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers Sale priceMember Price: $144.00
Non-Member Price: $187.00