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MS00500 - SEMI MS5 - Test Method for Wafer Bond Strength Measurements Using Micro-Chevron Test Structures
E07200 - SEMI E72 - 300 mm装置の床面積,高さ,重量の仕様ならびにガイド
SEMI E72 - 300 mm装置の床面積,高さ,重量の仕様ならびにガイド Sale priceMember Price: $171.00
Non-Member Price: $224.00
E00400 - SEMI E4 - 半導体製造装置通信スタンダード1 メッセージトランスファ(SECS-I)
E14200 - SEMI E142 - 基板マッピングの仕様
SEMI E142 - 基板マッピングの仕様 Sale priceMember Price: $171.00
Non-Member Price: $224.00
S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22
S02300 - SEMI S23 - 半導体製造装置で使用されるエネルギー,ユーティリティ,および材料の保全のためのガイド
S02200 - SEMI S22 - 半導體製造設備電氣設計安全基準
S01400 - SEMI S14 - 반도체 제조 장비의 화재 위험성 평가 및 완화 안전 가이드라인
PV08900 - SEMI PV89 - Test Method of Current-Voltage (I-V) Measurement in Indoor Lighting for Dye-Sensitized Solar Cell and Organic Photovoltaic and Perovskite Solar Cell (PSC)
F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors
F09500 - SEMI F95 - Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems
F00900 - SEMI F9 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition
F08800 - SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
F01200 - SEMI F12 - Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle
F102000 - SEMI F102 - Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) Sale priceMember Price: $144.00
Non-Member Price: $187.00
E07300 - SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps
SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps Sale priceMember Price: $144.00
Non-Member Price: $187.00
E16100 - SEMI E161 - Guide for Identification and Classification of Training Tiers
SEMI E161 - Guide for Identification and Classification of Training Tiers Sale priceMember Price: $144.00
Non-Member Price: $187.00
E12700 - SEMI E127 - Specification for Integrated Measurement Module Communications:  Concepts, Behavior, and Services (IMMC)
E11000 - SEMI E110 - Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports
E10800 - SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy
PV00900 - SEMI PV9 - Test Method for Excess Charge Carrier Decay in PV Silicon Materials by Non-Contact Measurements of Microwave Reflectance After a Short Illumination Pulse
PV05700 - SEMI PV57 - Test Method For Current-Voltage (I-V) Performance Measurement of Organic Photovoltaic (OPV) and Dye-Sensitized Solar Cell (DSSC) and Perovskite Solar Cell (PSC)