Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
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SEMI E136 - 半導体処理装置の高周波(RF)電力供給システムで使用されるRF電源の出力を決定するためのテスト方法
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SEMI E137 - Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
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SEMI E137 - 半导体制造设备总装、包装、运输、拆箱和搬运指南
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SEMI E137 - 半導体製造装置の最終組立,梱包,輸送,開梱,クリーンルームの製造領域への移送のためのガイド
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SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems
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SEMI E141 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology
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SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法
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SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle
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SEMI E144 - Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment
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SEMI E144 - 半導体製造装置および材料ハンドリング装置におけるキャリア内のRFIDタグとRFIDリーダの間の無線インタフェースの仕様
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SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers
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SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
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SEMI E150 - Guide for Equipment Training Best Practices
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SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
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