Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E154 - Specification for Mechanical Features of 450 mm Load Port
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア(450FOUP)とキネマティックカプリングの機械仕様
Sale price
Member Price : $176.00
SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
Regular price$300.00 USD
Sale price$193.00 USD
SEMI E159 - ウェーハの搬送及び,輸送のための多目的キャリア(MAC:Multi Application Carrier)の機械仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E161 - Guide for Identification and Classification of Training Tiers
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E161 - トレーニング階層の明確化および分類に関するガイド
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E163 - 特別に指定されたエリア内のレチクルおよびその他の静電気超敏感性(EES:EXTREMELY ELECTROSTATIC SENSITIVE)アイテムの取り扱いのためのガイド
Sale priceMember Price: $176.00
Non-Member Price: $231.00
Non-Member Price: $231.00
Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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