Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available
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Non-Member Price: $193.00
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SEMI E166 - 450 mmクラスタモジュール・インタフェースのための仕様:機械的インタフェースおよび搬送のスタンダード
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Non-Member Price: $231.00
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SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E176 - Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
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Non-Member Price: $193.00
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SEMI E177 - Specification for Transmission Electron Microscope (TEM) Lamella Carriers Used in Electron Microscopy Workflows
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E180 - Test Method for Measuring Surface Metal Contamination Through ICP-MS of Critical Chamber Components Used in Semiconductor Wafer Processing
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E180 - 通过ICP-MS测量半导体晶圆加工过程中关键腔室部件表面金属污染的试验方法
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E181 - Specification for Panel FOUP for Panel Level Packaging
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SEMI E182 - Specification for Panel FOUP Load Port for Panel Level Packaging
Sale priceFrom $193.00 USD
SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E185 - Specification for 300 mm Tape Frame FOUP
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF)
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons
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SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components
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Recently Published Standards
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH6 - Terminology for Flexible Hybrid Electronics (FHE)
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Non-Member Price: $193.00
SEMI E197 - Specification for Large Tray Stack FOUP (LTSF)
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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